03/17/2025
Research conducted by Festo finds a new generation of its low-energy flow-control valves used by Front Opening Unified Pods (FOUPs) purge systems can reduce Nitrogen gas consumption by as much as 75%. A new Festo white paper details how these piezo-based flow-control systems help semiconductor fabrication plants (Fabs) reduce their carbon footprint and lower energy costs.
FOUPs are used to securely transport semiconductor wafers in an oxygen and particle free environment from one manufacturing step to the next. Festo estimates that for every 1,000 FOUPs using precision N2 flow-control systems, Fabs can save \$163,000 per year in air-separation unit (ASU) electricity costs through reduced N2 demand. This figure is based on a \$0.06 kWh utility rate. Considering that the largest Fabs manufacturing 300 mm wafers can have upwards of 20,000 FOUPs active in daily production and that Fab electricity rates can go higher than \$0.06 per kWh, the \$163,000 can quickly multiply into millions of savings.
For every 1,000 FOUPs equipped with new generation purge systems, Festo calculates a reduction in the environment of 1,045 metric tons of carbon dioxide emissions directly from electricity generation. Putting this reduction into perspective, 1,045 tons of CO2 emitted into the atmosphere is the equivalent of burning 1.2 million pounds of coal according to the U.S. Environmental Protection Agency’s greenhouse gas equivalencies calculator.
The Festo piezo-based controlled-flow system reduces N2 flow from 20 nl/min to 5 nl/min per FOUP. The Festo N2 purge system significantly lowers the risk of oxidation and particle contamination. Festo N2 purge systems have a peak particle size per switching cycle of 0.1 μm, which is about five times smaller than current FOUP N2 purge systems. Closed-loop control ensures an accurate, reliable, stable, and linear flow rate – without hysteresis. The system’s repetition accuracy is rated at +/-0.25% of setpoint.
Low-friction piezo technology prolongs controller service life and minimizes maintenance. This solution requires less than one watt and reduces energy consumption by about 80% compared to competitive PWM proportional flow regulators. Festo N2 purge flow controllers consist of a two-way proportional valve, integrated flow sensor, and integrated electronics that include a power supply, high voltage technology for the piezo bender, piezo proportional control valve and precise control loop for the sensor.
About Festo
Festo is a leading manufacturer of pneumatic and electromechanical systems, components and controls for process and industrial automation. For more than 50 years in the U.S., Festo Corporation has continuously elevated the state of manufacturing with innovations and optimized motion control solutions that deliver higher performing, more profitable automated manufacturing and processing equipment. Through advanced technical and industrial education, Festo Didactic Learning Systems and its partners prepare workers for current and future manufacturing technologies. For more information, visit https://www.festo.com.
